Investigation of AlGaN/GaN HFET and VO2 Thin Film Based Deflection Transducers Embedded in GaN Microcantilevers
نویسندگان
چکیده
منابع مشابه
MOSFET-Embedded microcantilevers for measuring deflection in biomolecular sensors.
A promising approach for detecting biomolecules follows their binding to immobilized probe molecules on microfabricated cantilevers; binding causes surface stresses that bend the cantilever. We measured this deflection, which is on the order of tens of nanometers, by embedding a metal-oxide semiconductor field-effect transistor (MOSFET) into the base of the cantilever and recording decreases in...
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We report on a demonstration of GaN digital circuits implemented in a first generation GaN digital technology, which has yielded circuits of considerable complexity. We have implemented simple logic blocks, comparators, ring-oscillators and frequency dividers. We have yielded a 31-stage ring-oscillator using 217 transistors [1]. As a result of unique material characteristics GaN digital control...
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The present work analyzes theoretically and verifies the advantage of utilizing ɛ-microcantilever assemblies in microsensing applications. The deflection profile of these innovative ɛ-assembly microcantilevers is compared with that of the rectangular microcantilever and modified triangular microcantlever. Various force-loading conditions are considered. The theorem of linear elasticity for thin...
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The dynamic response of VO2-coated silicon microcantilevers thermally driven over the film’s insulator-to-metal transition was studied using laser light pulses directly incident on the cantilevers. The measured photothermal response revealed very high curvature changes of approximately 2500 m 1 up to pulse frequencies greater than 100 Hz and readily observable vibrations up to frequencies of a ...
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The recent development in oil and gas industry increases the production and consumption of oil. The enormous amount of oily wastewater produced is urged to be treated to prevent humanity and environment from being threatened. Membrane technology is an appealing alternative for oily wastewater treatment due to its design simplicity, energy efficiency and environmentally benign approach. In this ...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2020
ISSN: 2072-666X
DOI: 10.3390/mi11090875